@article{847676,
  author = {Joseph Kopanski and Jay Marchiando and Brian Rennex},
  title = {Carrier Concentration Dependence of Scanning Capacitance Microscopy Signal in the Vicinity of P-N Junctions},
  year = {2000},
  number = {B 18},
  month = {2000-01-01 00:01:00},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}