@article{847626,
  author = {Michael Cresswell and Richard Allen and William Guthrie and Christine Murabito and Ronald Dixson and Amy Hunt},
  title = {Comparison of SEM and HRTEM CD Measurements Extracted from Test-Structures Having Feature Linewidths from 40 nm to 240 nm},
  year = {2008},
  number = {57},
  month = {2008-01-01 00:01:00},
  publisher = {IEEE Transactions on Instrumentation and Measurement},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32240},
  language = {en},
}