@conference{847621,
  author = {Elizabeth Kenyon and Michael Cresswell and Heather Patrick and Thomas Germer},
  title = {Modeling the Effect of Finite Size Gratings on Scatterometry Measurements},
  year = {2008},
  month = {2008-02-25 00:02:00},
  publisher = {Proceedings of SPIE Advanced Lithography, San Jose, CA, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32956},
  language = {en},
}