@conference{847366,
  author = {Joseph Kopanski and Jay Marchiando and Brian Rennex},
  title = {Carrier Concentration Dependence of Scanning Capacitance Microscopy Signal in the Vicinity of P-N Junctions},
  year = {1999},
  month = {1999-06-01 00:06:00},
  publisher = {Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors,  Research Triangle Park, NC, USA},
  language = {en},
}