@article{847256,
  author = {Michael Cresswell and J. Sniegowski and Rathindra Ghoshtagore and Richard Allen and William Guthrie and A. Gurnell and Loren Linholm and E Teague},
  title = {Recent Developments in Electrical Linewidth and Overlay Metrology for Integrated Circuit Fabrication Processes},
  year = {1996},
  number = {35},
  month = {1996-12-31 00:12:00},
  publisher = {Japanese Journal of Applied Physics},
  language = {en},
}