@article{846621,
  author = {V. Milanovic and Michael Gaitan and E. Bowen and Mona Zaghloul},
  title = {Micromachined Coplanar Waveguides in CMOS Technology},
  year = {1996},
  number = {6},
  month = {1996-10-01 00:10:00},
  publisher = {IEEE Microwave and Guided Wave Letters},
  language = {en},
}