@conference{846501,
  author = {Alain Diebold and M. Kump and Joseph Kopanski and David Seiler},
  title = {Characterization of Two-Dimensional Dopant Profiles: Status and Review},
  year = {1995},
  month = {1995-12-31 00:12:00},
  publisher = {Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA},
  language = {en},
}