@conference{846496,
  author = {Alain Diebold and M. Kump and Joseph Kopanski and David Seiler},
  title = {Characterization of Two-Dimensional Dopant Profiles: Status and Review, Extended Abstracts},
  year = {1994},
  number = {94-33},
  month = {1994-12-31 00:12:00},
  publisher = {Extended Abstracts of the Electrochemical Society, Miami, FL, USA},
  language = {en},
}