@conference{846446,
  author = {Joseph Kopanski and Jay Marchiando and J Lowney},
  title = {Scanning Capacitance Microscopy Measurements and Modeling: Progress Towards Dopant Profiling of Silicon},
  year = {1995},
  month = {1995-12-31 00:12:00},
  publisher = {Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA},
  language = {en},
}