@article{846331,
  author = {Michael Cresswell and Richard Allen and William Guthrie and Rathindra Ghoshtagore and Loren Linholm and J. Sniegowski},
  title = {Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference-Material Applications},
  year = {1998},
  number = {11},
  month = {1998-05-01 00:05:00},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  language = {en},
}