@article{846216,
  author = {E Handy and M Rao and O Holland and P Chi and K Jones and M Derenge and R Vispute and T Venkatesan},
  title = {Al, B, and Ga Ion-Implantation Doping of SiC},
  year = {2000},
  number = {29},
  month = {2000-11-01 00:11:00},
  publisher = {Journal of Electronic Materials},
  language = {en},
}