@article{845961,
  author = {Joseph Kopanski and Santos Mayo},
  title = {Intermittent-Contact Scanning Capacitance Microscope for Lithographic Overlay Measurement},
  year = {1998},
  number = {72},
  month = {1998-05-11 00:05:00},
  publisher = {Applied Physics Letters},
  language = {en},
}