@conference{845756, author = {Joseph Kopanski and Jay Marchiando and David Berning}, title = {Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles across Junctions}, year = {1997}, month = {1997-12-31 00:12:00}, publisher = {Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA}, language = {en}, }