@conference{845756,
  author = {Joseph Kopanski and Jay Marchiando and David Berning},
  title = {Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles across Junctions},
  year = {1997},
  month = {1997-12-31 00:12:00},
  publisher = {Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA},
  language = {en},
}