@book{845721,
  author = {F Stevie and David Simons and J McKinley and J McMacken and R Santiesteban and P Flatch and J Becerro},
  title = {Dose Calibration of Ion Implanters for Semiconductor Production},
  year = {1998},
  month = {1998-02-01 00:02:00},
  publisher = {Wiley, Hoboken, NJ},
  language = {en},
}