@article{845616, author = {Nhan Nguyen and Joseph Pellegrino and Paul Amirtharaj and David Seiler and S. Qadri}, title = {Interface Roughness of Short-Period AlAs/GaAs Superlattices Studied by Spectroscopic Ellipsometry}, year = {1993}, number = {73}, month = {1993-06-01 00:06:00}, publisher = {Journal of Applied Physics}, language = {en}, }