@article{845351, author = {W Zagozdzon-wosik and K Korablev and I Rusakova and David Simons and J Shi and P Chi and J Wolfe}, title = {Formation of Shallow Junctions During Rapid Thermal Processing from Electron-Beam Deposited Boron Sources}, year = {1996}, number = {143}, month = {1996-12-01 00:12:00}, publisher = {Journal of the Electrochemical Society}, language = {en}, }