@article{845006,
  author = {D Kremer and R Davis and Elizabeth Moore and S Ehrman},
  title = {A Numerical Investigation of the Effects of Gas-Phase Particle Formation on Silicon Film Deposition from Silane},
  year = {2003},
  number = {247},
  month = {2003-01-01 00:01:00},
  publisher = {Journal of Crystal Growth},
  language = {en},
}