@article{844746,
  author = {J Scott and E Landree and Terrence Jach and Eric Windsor},
  title = {Silicon Oxynitride Film Thickness Measurements Using HRTEM and Grazing Incidence X-Ray Photoelectron Spectroscopy (GIXPS)},
  year = {2000},
  number = {6},
  month = {2000-08-01 00:08:00},
  publisher = {Microscopy and Microanalysis},
  language = {en},
}