@article{844681, author = {E Handy and M Rao and K Jones and M Derenge and P Chi and R Vispute and T Venkatesan and N Papanicolaou and J Mittereder}, title = {Effectiveness of AlN Encapsulate in Annealing Ion-Implanted SiC}, year = {1999}, number = {86}, month = {1999-07-01 00:07:00}, publisher = {Journal of Applied Physics}, language = {en}, }