@article{844611,
  author = {G Ramanath and J Greene and I Petrov and J Baker and L Allen and J Gillen},
  title = {Channeling-Induced Asymmetric Distortion of Depth Profiles from Polycrystalline-TiN/Ti/TiN(001) Trilayers During Secondary Ion Mass Spectrometry},
  year = {2000},
  number = {18},
  month = {2000-05-01 00:05:00},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}