@article{844191,
  author = {D Kremer and R Davis and Elizabeth Moore and James Maslar and Donald Burgess Jr. and S Ehrman},
  title = {An Investigation of Particle Dynamics in a Rotating Disk Chemical Vapor Deposition Reactor},
  year = {2003},
  number = {150},
  month = {2003-02-01 00:02:00},
  publisher = {Journal of the Electrochemical Society},
  language = {en},
}