@article{844171,
  author = {T Gougousi and Y Xu and J Kidder and G Rubloff and Charles Tilford},
  title = {Process Diagnostics and Thickness Metrology Using in Situ Mass Spectrometry for the Chemical Vapor Deposition of W from H<sub>2</sub>/WF<sub>6</sub>},
  year = {2000},
  number = {18},
  month = {2000-05-01 00:05:00},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}