@article{843696,
  author = {P Thompson and C Silvestre and M Twigg and G Jernigan and David Simons},
  title = {Atomic Hydrogen for the Formation of Abrupt Sb Doping Profiles in MBE-Grown Si},
  year = {1998},
  number = {321},
  month = {1998-05-01 00:05:00},
  publisher = {Thin Solid Films},
  language = {en},
}