@article{843406, author = {Young Song and Steven Erwin and Gregory Rutter and Phillip First and Nikolai Zhitenev and Joseph Stroscio}, title = {Making Mn Substitutional Impurities in InAs using a Scanning Tunneling Microscope}, year = {2009}, number = {9}, month = {2009-09-29 00:09:00}, publisher = {Nano Letters}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903324}, language = {en}, }