@article{842811,
  author = {Alain Diebold and J Canterbury and W Chism and Curt Richter and Nhan Nguyen and James Ehrstein and C Weintraub},
  title = {Characterization and Production Metrology of Gate Dielectric Films: Optical Models for Oxynitrides and High Dielectric Constant Films},
  year = {2001},
  number = {4},
  month = {2001-02-06 00:02:00},
  publisher = {Materials Science in Semiconductor Processing},
  language = {en},
}