@conference{842701, author = {J.T. Ryan and Patrick Lenahan and A.T. Krishnan and S. Krishnan and Jason Campbell}, title = {An Electrically-Detected Magnetic Resonance Study of the Atomic-Scale Effects of Fluorine on the Negative Bias Temperature Instability}, year = {2009}, month = {2009-01-05 00:01:00}, publisher = {2008 IEEE International Integrated Reliability Workshop, South Lake Tahoe, NV, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=900189}, language = {en}, }