@conference{842681,
  author = {Nhan Nguyen and James Maslar and Junghyeun Kim and Jin-Ping Han and Jin-Won Park and Deane Chandler-Horowitz and Eric Vogel},
  title = {Characterization of Structural Quality of Bonded Silicon-On-Insulator Wafers by Spectroscopic Ellipsometry and Raman Spectroscopy},
  year = {2005},
  month = {2005-05-09 00:05:00},
  publisher = {High  -Mobility Group -IV Materials and Devices, MRS Proceedings, San Francisco, CA, USA},
  language = {en},
}