@article{842676,
  author = {M Seah and S Spencer and F Bensebaa and I Vickridge and H Danzebrink and Michael Krumrey and T Gross and W Oesterle and E Wendler and B Rheinlander and Yasushi Azuma and I Kojima and N Suzuki and M Suzuki and Shigeo Tanuma and D Moon and Hansuek Lee and H Cho and H Chen and A Wee and T Osipowicz and J Pan and W Jordaan and R Hauert and U Klotz and C van der marel and M Verheijen and Y Tamminga and C Jeynes and P Bailey and S Biswas and U Falke and Nhan Nguyen and Deane Chandler-Horowitz and James Ehrstein and D Muller and Joseph Dura},
  title = {Critical Review of the Current Status of Thickness Measurements for Ultrathin SiO2 on Si, Part V: Results of a CCQM Pilot Study},
  year = {2004},
  number = {36},
  month = {2004-10-01 00:10:00},
  publisher = {Surface and Interface Analysis},
  language = {en},
}