@conference{842556,
  author = {Nadine Guillaume and Michael Cresswell and Richard Allen and Sarah Everist and Loren Linholm},
  title = {Comparison of Sheet-Resistance Measurements Obtained By Standard and Small-Area Four-Point Probing},
  year = {1999},
  month = {1999-05-01 00:05:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Goteborg, 1, SW},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=5777},
  language = {en},
}