@conference{842526,
  author = {Michael Cresswell and Brandon Park and Richard Allen and William Guthrie and Ronald Dixson and Wei Tan and Christine Murabito},
  title = {Comparison of SEM and HRTEM CD-Measurements Extracted from Monocrystalline Tes-Structures Having Feature Linewidths from 40 nm to 240 nm},
  year = {2005},
  month = {2005-04-18 00:04:00},
  publisher = {ICMTS 2005 International Conference on Microelectronic Test Structures, Leuven, 1, BE},
  language = {en},
}