@article{842476,
  author = {C. Driemeier and K Bastos and L Miotti and I.J.R. Baumvol and Nhan Nguyen and Safak Sayan and C Krug},
  title = {Compositional Stability of Hafnium Aluminates Thin Films Deposited on Si by Atomic Layer Deposition},
  year = {2005},
  number = {86},
  month = {2005-11-17 00:11:00},
  publisher = {Applied Physics Letters},
  language = {en},
}