@conference{842441, author = {J.T. Ryan and Patrick Lenahan and A.T. Krishnan and S. Krishnan and Jason Campbell}, title = {Spin Dependent Recombination Study of the Atomic-Scale Effects of Fluorine on the Negative Bias Temperature Instability}, year = {2009}, month = {2009-04-26 00:04:00}, publisher = {2009 IEEE International Reliability Physics Symposium, Montreal, CA}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902305}, language = {en}, }