@article{841631,
  author = {F Chien and W Hsieh and S Gwo and Jay Jun and Richard Silver and Andras Vladar and John Dagata},
  title = {Characterization of Prototype Silicon Pitch Artifacts Fabricated by Scanning Probe Lithography and Anisotropic Wet Etching},
  year = {2005},
  number = {23},
  month = {2005-01-01 00:01:00},
  publisher = {Journal of Applied Physics},
  language = {en},
}