@conference{841146,
  author = {R Katz and C Chase and R Kris and R Peltinov and John Villarrubia and B Bunday},
  title = {Bias Reduction in Roughness Measurement through SEM Noise Removal},
  year = {2006},
  number = {6152},
  month = {2006-03-24 00:03:00},
  publisher = {Proceedings of SPIE, San Jose, CA, USA},
  language = {en},
}