@conference{841056,
  author = {Xuezeng Zhao and Joseph Fu and Wei Chu and C Nguyen and Theodore Vorburger},
  title = {An Image Stitching Method to Eliminate the Distortion of the Sidewall in Linewidth Measurement},
  year = {2004},
  number = {5375},
  month = {2004-05-01 00:05:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVIII, Richard M. Silver, Editor, Santa Clara, CA, USA},
  language = {en},
}