@conference{840981,
  author = {T Mcwaid and J Schneir and Theodore Vorburger},
  title = {A Calibrated Atomic Force Microscope},
  year = {1994},
  month = {1994-01-01 00:01:00},
  publisher = {Proceedings of the 3rd International Conference on Ultraprecision in Manufacturing Engineering, Aachen, DE},
  language = {en},
}