@article{840771, author = {James Clarke and Martin Schmidt and Ndubuisi Orji}, title = {Photoresist Cross-sectioning with Negligible Damage using a Dual-beam FIB-SEM: A High Throughput Method for Profile Imaging}, year = {2007}, number = {25}, month = {2007-11-01 00:11:00}, publisher = {Journal of Vacuum Science and Technology B}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823232}, language = {en}, }