@article{840746,
  author = {R Parks and L Shao and Angela Davies and Christopher Evans},
  title = {Haidinger Interferometer for Silicon Wafer TTV Measurement},
  year = {2001},
  month = {2001-08-22 00:08:00},
  publisher = {Characterization and Metrology for ULSI Technology Conference},
  language = {en},
}