@conference{840741,
  author = {R Koning and Ronald Dixson and Joseph Fu and Thomas Renegar and Theodore Vorburger and V Tsai and Michael Postek},
  title = {Step Height Metrology for Data Storage Applications},
  year = {1999},
  number = {3806},
  month = {1999-11-01 00:11:00},
  publisher = {Proceedings of SPIE, Denver, CO, USA},
  language = {en},
}