@conference{840666,
  author = {James Roberts and W Banke and Ronald Dixson},
  title = {Leveraging LER to Minimize Linewidth Measurement Uncertainty in a Calibration Exercise},
  year = {2007},
  number = {6518},
  month = {2007-04-05 00:04:00},
  publisher = {Proceedings of SPIE, San Jose, CA, USA},
  language = {en},
}