@conference{840651, author = {Theodore Vorburger and Ronald Dixson and Joseph Fu and Ndubuisi Orji and Shaw Feng and Michael Cresswell and Richard Allen and William Guthrie and Wei Chu}, title = {Nano- and Atomic-Scale Length Metrology}, year = {2006}, month = {2006-01-01 00:01:00}, publisher = {Proceedings of International Symposium on Instrumentation Science and Technology, Harbin, 1, CH}, language = {en}, }