@conference{840626,
  author = {Wei Chu and Joseph Fu and Ronald Dixson and Theodore Vorburger},
  title = {Linewidth Measurement Based on Automatically Matched and Stitched Images},
  year = {2007},
  number = {931},
  month = {2007-01-01 00:01:00},
  publisher = {Proceedings of the International Conference on Frontiers of Characterization and Metrology for Nanoelectronics: 2007, Harbin, 1, CH},
  language = {en},
}