@conference{840611,
  author = {B Bunday and J Allgair and E Solecky and C Archie and Ndubuisi Orji},
  title = {The Coming of Age of Tilt CD-SEM},
  year = {2007},
  month = {2007-03-01 00:03:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XXI
Chas N. Archie, Editor, San Jose, CA, US},
  language = {en},
}