@conference{840381, author = {Jing Li and Yin-Lin Shen and Jaehwa Jeong and Fredric Scire and John Kramar}, title = {A COMPACT, COMPOUND ACTUATOR FOR THE MOLECULAR MEASURING MACHINE}, year = {2008}, month = {2008-10-19 00:10:00}, publisher = {American Society for Precision Engineering, Annual Meeting | 23rd | Proceedings of ASPE 23rd Annual Meeting | American Society for Precision Engineering, Portland, OR, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824698}, language = {en}, }