@conference{840361,
  author = {Crossley Jayewardene and William Keery and Michael Postek and Andras Vladar and Bradley Damazo},
  title = {Design and Development of a Measurement and Control System for Measuring SEM Magnification Calibration Samples},
  year = {2002},
  number = {4689},
  month = {2002-06-01 00:06:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVI, Daniel J. C. Herr, Editor, Santa Clara, CA, USA},
  language = {en},
}