@article{840341,
  author = {Marc Tricard and Paul Dumas and Christopher Hall and Ulf Griesmann and Quandou Wang},
  title = {Manufacture of Extremely Flat 300 mm Silicon Wafers},
  year = {2021},
  month = {2021-10-12 15:10:19},
  publisher = {Cirp Annals-Manufacturing Technology},
  language = {en},
}