@conference{840156,
  author = {Theodore Vorburger and Ronald Dixson and Jun-Feng Song and Thomas Renegar and Joseph Fu and Ndubuisi Orji and V Tsai and E. Williams and H Edwards and D Cook and P West and R Nyffenegger},
  title = {Atomic Level Surface Metrology},
  year = {2001},
  month = {2001-01-01 00:01:00},
  publisher = {Defense Manufacturing Conference, Unknown, 1, USA},
  language = {en},
}