@conference{840081,
  author = {N Orji and Jayaraman Raja and Theodore Vorburger},
  title = {Atomic Force Microscopy of Semiconductor Line Edge Roughness},
  year = {2002},
  number = {17},
  month = {2002-10-01 00:10:00},
  publisher = {Proceedings of the American Society for Precision Engineering, St. Louis, MO, USA},
  language = {en},
}