@article{840056,
  author = {Charles Bouldin and William Wallace and G Lynn and S Roth and Wen-Li Wu},
  title = {Thermal Expansion Coefficients of Low-K Dielectric Films From Fourier Analysis of X-Ray Reflectivity},
  year = {2000},
  number = {88},
  month = {2000-07-01 00:07:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=850326},
  language = {en},
}