@conference{839981,
  author = {R Koning and Ronald Dixson and Joseph Fu and G Peng and Theodore Vorburger},
  title = {Interferometric Calibration of a Capacitance Displacement Sensor Over Short Displacement Ranges},
  year = {2000},
  month = {2000-01-01 00:01:00},
  publisher = {Proceedings of 4th Seminar on Quantitative Microscopy, K. Hasche, et al., Editors, PTB Report PTB-F-39, , 1, AU},
  language = {en},
}